Therma-Wave Receives Going Concern Opinion

Therma-Wave, Inc., (Nasdaq:TWAV) a worldwide leader indevelopment, manufacture and sale of process control metrology systemsused in the manufacture of semiconductors, in compliance with NASDAQMarketplace Rule 4350(b)(1)(B), today announced that the Company'sindependent registered public accounting firm included a going concernexplanatory paragraph in its report on Therma-Wave's consolidatedfinancial statements as of and for the fiscal year ended April 2,2006. The qualification was included as a result of the Company'srecurring net losses and negative cash flows. For more informationregarding this matter, please see Therma-Wave's Annual Report on Form10-K filed with the Securities and Exchange Commission on June 14,2006.

About Therma-Wave, Inc.

Since 1982, Therma-Wave Inc., has been revolutionizing processcontrol metrology systems through innovative proprietary products andtechnologies. The company is a worldwide leader in the development,manufacture, marketing and service of process control metrologysystems used in the manufacture of semiconductors. Therma-Wavecurrently offers leading-edge products to the semiconductormanufacturing industry for the measurement of transparent andsemi-transparent thin films; for the measurement of criticaldimensions and profile of IC features and for the monitoring of ionimplantation. For further information about Therma-Wave, Inc., accessthe web site at: www.thermawave.com